Suspension for maintaining mirror flatness of a MEMS device in a scanner system or the like

ABSTRACT

Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.

BACKGROUND

Thin films on semiconductor substrates often cause curvature due to residual stresses. For example, a metal layer deposited on a silicon membrane will cause warping of the membrane. When a microelectromechanical system (MEMS) scanning mirror is formed on the membrane, such warping may introduce optical aberrations because the warping may cause the surface of the mirror to deviate from an ideally flat mirror surface.

Typically, the substrate layer that the thin film is deposited onto is designed to be sufficiently thick to withstand the residual stress with minimal deviations that may occur due to warping. For structures designed to have movable parts, such as scanning mirrors, this structural layer thickness makes it difficult to design members that have low enough stiffness to enable a reasonable amount of motion under an available actuation force. MEMS scanning mirrors, for example, should have a suspension that is flexible enough to allow the scanning mirror to deflect by the desired amount within actuator limits. As a result, there may be competing requirements for the structural layer: sufficient thickness to prevent warping on the one hand, and sufficient thinness to avoid resisting the actuation forces on the other.

Adding thickness to the moving parts of a MEMS scanning mirror may be detrimental because there are likely to be some minimal acceptable resonant frequencies for some natural modes of resonance. Extra thickness of the moving parts adds to the effective mass of the natural modes, so such higher effective stiffness will be required to satisfy minimum resonant frequency requirements. Higher stiffness tends to increase the amount of actuation force needed to achieve a desired deflection of the moving parts, thereby increasing the power requirements to operate the device. A higher stiffness requirement also tends to increase the size of a MEMS device because a stiffer suspension generally has a larger size to keep stress levels within safe limits.

DESCRIPTION OF THE DRAWING FIGURES

Claimed subject matter is particularly pointed out and distinctly claimed in the concluding portion of the specification. However, such subject matter may be understood by reference to the following detailed description when read with the accompanying drawings in which:

FIG. 1 is block diagram of a scanner system in accordance with one or more embodiments;

FIG. 2 is block diagram of a scanner system showing subcomponents of the scanner system in accordance with one or more embodiments;

FIG. 3 is a block diagram of a scanning module of a scanner system in accordance with one or more embodiments;

FIG. 4 is a top plan view of a MEMS device for a scanner system in accordance with one or more embodiments;

FIG. 5 is a perspective view of the MEMS device showing mechanical isolation of the mirror structure from the pivot structure to maintain flatness of the mirror structure accordance with one or more embodiments;

FIG. 6 is a top plan view of the MEMS device mirror showing mechanical isolation of the mirror structure from the pivot structure to maintain flatness of the mirror structure accordance with one or more embodiments;

FIG. 7A is a top plan view of a mirror of a MEMS device in comparison with a graph in FIG. 7B of flex information showing the amount of flex in the mirror of the MEMS device along an axis of rotation in accordance with one or more embodiments;

FIGS. 8A and 8B are a graphs of surface flex of a MEMS device mirror in accordance with one or more embodiments showing a reduced amount of flex in the mirror surface via the stress isolating structures of the MEMS device in accordance with one or more embodiments; and

FIG. 9 is a block diagram of an information handling system capable of utilizing a suspension for maintaining mirror flatness in MEMS device or the like in accordance with one or more embodiments.

It will be appreciated that for simplicity and/or clarity of illustration, elements illustrated in the figures have not necessarily been drawn to scale. For example, the dimensions of some of the elements may be exaggerated relative to other elements for clarity. Further, if considered appropriate, reference numerals have been repeated among the figures to indicate corresponding and/or analogous elements.

DETAILED DESCRIPTION

In the following detailed description, numerous specific details are set forth to provide a thorough understanding of claimed subject matter. However, it will be understood by those skilled in the art that claimed subject matter may be practiced without these specific details. In other instances, well-known methods, procedures, components and/or circuits have not been described in detail.

In the following description and/or claims, the terms coupled and/or connected, along with their derivatives, may be used. In particular embodiments, connected may be used to indicate that two or more elements are in direct physical and/or electrical contact with each other. Coupled may mean that two or more elements are in direct physical and/or electrical contact. However, coupled may also mean that two or more elements may not be in direct contact with each other, but yet may still cooperate and/or interact with each other. For example, “coupled” may mean that two or more elements do not contact each other but are indirectly joined together via another element or intermediate elements. Finally, the terms “on,” “overlying,” and “over” may be used in the following description and claims. “On,” “overlying,” and “over” may be used to indicate that two or more elements are in direct physical contact with each other. However, “over” may also mean that two or more elements are not in direct contact with each other. For example, “over” may mean that one element is above another element but not contact each other and may have another element or elements in between the two elements. Furthermore, the term “and/or” may mean “and”, it may mean “or”, it may mean “exclusive-or”, it may mean “one”, it may mean “some, but not all”, it may mean “neither”, and/or it may mean “both”, although the scope of claimed subject matter is not limited in this respect. In the following description and/or claims, the terms “comprise” and “include,” along with their derivatives, may be used and are intended as synonyms for each other.

Referring now to FIG. 1, a block diagram of a scanner system in accordance with one or more embodiments will be discussed. As shown in FIG. 1, scanner system 100 may comprise a data processing, storage, and management block 110. In general, the data processing, storage, and management block may be referred to as processor 110. Processor 110 may send control signals to scan line generator block 112 to cause scan line generator 112 to generate a laser beam swept across a target such as a bar code in a generally linear sweep across the target. In general, a sweep scan may also be referred to as a sweep range or a scan angle. In one or more embodiments, scan line generator 112 may generate a linear sweep scan line in one dimension, for example to read a one-dimensional type bar code, and in one or more alternative embodiments, scan line generator 112 may generate a non-linear sweep scan, and/or or a scan along two scan lines that may be orthogonal to one another, and/or non-orthogonal in some embodiments, for example to read a two-dimensional type bar code or other code or symbol, although the scope of the claimed subject matter is not limited in these respects.

Scanner system 100 may comprise a target bar code imager 114 that is capable of capturing light emitted from scan line generator 112 that is reflected off of the target bar code as a reflectance profile of the target to convert the reflectance profile into an electrical signal representative of information stored in the target bar code. Target bar code imager 114 then sends the reflectance profile signal to processor 110 for decoding of the information stored in the target bar code.

In one or more embodiments, scanner system 100 may further include a user interface 116 capable of allowing a user to control scanner system 100. For example, user interface 116 may include one or more buttons or other actuators to cause scan line generator 112 emit the scan line to capture the target bar code. User interface 116 optionally may include devices for indicating to a user that a target bar code was successfully scanned, for example one or more lights, displays, speakers, and so on, and/or to provide other operational information to the user to assist the user in operating scanning system 100.

In addition, scanning system 100 may include a communications/connectivity block 118 that includes circuits for allowing scanning system 100 to connect to one or more other devices, for example to send information obtained from scanned targets to remote devices such as a computer, server, and/or other type of information handling system. Furthermore, communications/connectivity block 118 may provide one or more interfaces capable of allowing scanning system 100 to be utilized in conjunction with such other devices, for example such another device may comprise a point of sale (POS) terminal that may utilize scanning system 100 to capture target bar codes disposed on goods sold by a user operating the POS terminal. Furthermore, communications/connectivity block 118 may include various interfaces to allow scanning system 100 to be updated with new programs or software to be stored in and/or executed by processor 110. Communications/connectivity block 118 optionally may include one or more wireless communication systems to allow scanning system 100 to communicate with one or more remote devices via a wireless communication link. Such wireless communication links may comprise, for example, an infrared type communication link, a Bluetooth type communication link, an Institute of Electrical and Electronics Engineers (IEEE) 802.11a/b/g/n type communication link, a broadband type communication link such as a Third Generation Partnership Project (3GPP) type cellular communication link or a Wireless Interoperability for Microwave Access (WiMAX) type communication link, and so on, although the scope of the claimed subject matter is not limited in these respects. In addition, scanning system 100 may include a power management block 120 that is capable of controlling and/or managing the operational power utilized by scanning system. For example, power management block 120 may power down scan line generator 112 when target bar codes are not being captured after a predetermined period of time to conserve power such as when scanning system 100 is being powered by a battery.

Referring now to FIG. 2, a block diagram of a scanner system showing subcomponents of the scanner system in accordance with one or more embodiments will be discussed. The diagram shown in FIG. 2 is one particular embodiment of scanning system 100 of FIG. 1. However, other variations of the particular subcomponents of scanning system 100 may be utilized, including more or fewer components, or substitute or alternative components, and the scope of the claimed subject matter is not limited in these respects. As shown in FIG. 2, scanning system 100 generally corresponds to one particular embodiment of scanning system 100 of FIG. 1, including processor 110, scan line generator 112, target bar code imager 114, user interface 116, communications/connectivity block 118, and/or power management block 120. Processor 110 may comprise an internal timer 210 to provide a timing reference for scanning system 100. In one or more embodiments, the period of the timing reference may comprise 10 microseconds, although the scope of the claimed subject matter is not limited in this respect. A pulse width modulator 212 may generate a pulse signal to constant power laser drive 214 to provide a signal for driving laser 216. In response to the driving signal received from constant power laser drive 214, laser 216 may emit a beam of laser light that impinges upon a reflector of microelectromechanical system (MEMS) scanner 218. MEMS device 218 is caused to oscillate and/or otherwise move in a desired pattern to cause the reflected laser beam emitted from laser 216 to sweep across a target 230 for capturing and decoding of the target 230. In one or more embodiments, memory 220 may contain values for a waveform with which MEMS device 218 is driven to cause the laser beam to sweep in a desired or predetermined pattern across target 230. The waveform stored in memory 220 may comprise digital values of the waveform for a given period of the waveform that may be converted to an analog signal via digital-to-analog converter (DAC) 222 and filtered with a reconstruction filter 224 to provide a smoother waveform to drive MEMS device 218. In one or more embodiments, the waveform stored in memory 220 may comprise a generally sinusoidal type waveform stored with 10 bits of quantization levels, and DAC 222 may comprise a 10 bit digital-to-analog converter operating at 100 kilosamples per second. Reconstruction filter 224 may comprise a resistor-capacitor type low pass filter capable of removing harmonics from the waveform above the fundamental frequency of the waveform stored in memory 220 to provide a generally smoother waveform to linear amplifier 226 that provides the driving signal to MEMS device 218.

In one or more embodiments, laser light is emitted from laser 216 to onto MEMS device 218 which in turn reflects the laser light onto target 230 in a pattern determined by the waveform stored in memory 222. The laser light is passed through window 228 and reflected off of target 230 back into window 228 of scanning system 100. Window 228 may provide some filtering of ambient light to assist in capturing light reflected off of target 230 without capturing ambient light or other optical noise that may be present in the environment in which scanning system 100 may be operated. Captured light may be further filtered via filter 232 and focused with lens 234 onto an optical detector 236 that may comprise, for example, a positive-intrinsic-negative (PIN) diode or the like. Light impinging on light detector may modulate a current that is amplified by amplifier 238, which may provide preamplification type functions and/or bandpass filter type functions to provide an electrical signal representative of the reflectance profile of light reflected off of target 230 onto optical detector 236. The output of amplifier 238 may then be provided to analog edge detector 240 for detecting edge transitions in electrical signal that correspond, for example, to the edges of bars or other symbols in target code 230. The output of analog edge detector 240 may then be provided to an input capture block 242 of processor 110 for decoding of the signal based on the output of analog edge detector 240. For example, the times between edges detected by analog edge detector 240 may correspond to the widths of the bars in the bar code of target 230, which in turn may correspond to data encoded in the bar code from which the data may be extracted. The resulting decoded signal may be stored, at least temporarily, in a non-volatile memory such as flash memory 246 and/or in a volatile type memory such as random access memory (RAM) 248. Furthermore, programs, software, and/or other data may be stored in flash memory 246 and/or RAM 248. A real time clock (RTC) 256 may be utilized to provide a time reference for processor 110 that may be utilized, for example, to time the interval between pulse edges detected by analog edge detector 240. In one or more embodiments, a coil resistance verification circuit 244 may be utilized to detect whether the coil of MEMS device 218 has failed and is an open circuit or a short circuit, or whether the coil resistance is within a normal range. In the event coil resistance verification circuit 244 detects an open circuit and/or a short circuit in the coil of MEMS device 218, processor 110 may shut off power to laser 216, for example for safety purposes, although the scope of the claimed subject matter is not limited in these respects.

In one or more embodiments, user interface 116 may comprise a button 250 that may be used by a user to actuate scanning of target 230 by scanning system 100. For example, in response to a user actuating button 250, processor 110 may turn on power to laser 216. A light such as light emitting diode (LED) 252 may be used to provide a visual indication to the user that scanning system 100 is operating and attempting to capture a target 230, and/or that the attempted capture of the target has failed and/or has been successful. Furthermore, user interface 116 may include a beeper 254 which may comprise a speaker or other device capable of generating and audible signal, which may likewise indicate to a user that the that scanning system 100 is operating and attempting to capture a target 230, and/or that the attempted capture of the target has failed and/or has been successful. Various combinations of light pulses, light flashed, solid illumination, and/or tones may be utilized to provide combinations of feedback to the user concerning the operation of scanning system 100 and/or the capturing of a target 230 by scanning system 100. Optionally, user interface 116 may include a display capable of providing more advanced and/or more detailed information to the user pertaining to the operation of scanning system and/or the capturing of a target 230 by scanning system 100, although the scope of the claimed subject matter is not limited in this respect.

In one or more embodiments, communications/connectivity block 118 may comprise a first universal asynchronous receiver-transmitter (UART) 258 for handling serial type communications and/or a second UART 260. UART 258 may couple to a recommended standard-232 (RS-232) driver 262 to couple scanning system 100 to remote devices via an RS-232 type interface. UART 260 may likewise couple to remote devices using a serial type interface such as RS-232. UART 258 and/or UART 260 may further couple to one or more remote devices using various other types of communication interfaces such as Bluetooth, IEEE 802.11a/b/g/n, and so on. In one or more embodiments, RS 232 driver 262 may couple to a stereo jack such as a one-eighth inch stereo jack to couple scanning system 100 to one or more other devices during operation of scanning system 100, for example to implement a tethered mode of operation. In one or more embodiments, UART 260 may couple to a remote device or computer for performing debugging or the like type operations for scanning system 100. However, these are merely example types of communication systems and/or interfaces for scanning system 100, and the scope of the claimed subject matter is not limited in these respects.

In one or more embodiments, power management block 120 of scanning system 100 may include a power source such as battery 264, which may optionally include a serially connected fuse 266, to provide an operational voltage for scanning system 100. The battery voltage (V_(BATTERY)) of battery 264 may be provided to voltage regulator 268 to provide a regulated operational voltage to scanning system 100. One or more power switches 270 may be coupled to voltage regulator 268 for powering scanning system 100 on or off. Power switches 270 may provide a first voltage level (V_(ANALOG)) to power analog devices of scanning system 100 at an appropriate voltage for such analog circuits, and/or may provide a second voltage level (V_(DIGITAL)) to power digital devices of scanning system 100 at an appropriate voltage for such digital devices. The battery voltage from battery 264 may also be provided to an analog-to-digital converter (ADC) 274, which may comprise a 10 bit converter, to provide a voltage reference signal to processor 110 which may monitor the output voltage of battery 264, for example to indicate to the user that the charge on battery 264 is sufficient for operating scanning system 100, or to indicate to the user that the charge on battery 264 is low and should be recharged. Processor 110 may include a peripheral serial bus 276 to couple to an electrically erasable program read only memory (EEPROM) 272 capable of being utilized for storing data from one or more decoded targets for example in a batch mode, and/or for storing programs and/or data capable of being executed by processor 110, for example to control the operation of scanning system 100, although the scope of the claimed subject matter is not limited in these respects.

Referring now to FIG. 3, a perspective diagram of a MEMS based laser scanning module of a scanner system in accordance with one or more embodiments will be discussed. As shown in FIG. 3, scanning module 300 may comprise a frame 310 into which various components of scan line generator 112 may be disposed. In one or more embodiments, frame 310 may comprise a unitary structure comprising a molded plastic or the like. Frame 310 may comprise a first section 328 into which laser 216 may be inserted and fastened in place via snap arm 318. Laser 216 may comprise a transistor outline (TO) can type device inserted into a cylindrical cover 330 having a slot or groove 332 into which a tab 334 of snap arm 318 may fit to hold laser 216 in place within first section 328. First section 328 may be further sized and/or shaped to contain laser 216 and restrict the lateral and/or longitudinal movement of laser 216 within first section 328. Such an arrangement of laser 216 and/or first section 328 may function to allow ease of insertion and/or removal of laser 216 into first section 328 of frame 310, and further to provide physical alignment of laser 216 such that a laser beam emitted from laser 216 may impinge upon MEMS device 218. Likewise, frame 310 may include second section 336 into which MEMS device 218 may be disposed and held within a proper alignment in second section 336 so that the laser beam emitted from laser 216 may impinge upon MEMS device 218 through window 338 formed in frame 310. Second section 336 may have a size and/or shape to allow magnet 312 and magnet 314 to be placed adjacent to MEMS device 218 and to further receive field plate 316 adjacent to and coupled with magnets 312 and 314. In addition, spring clip 340 may provide a bias force against field plate 316 to further secure field plate 316, magnets 312 and 314, and MEMS device 218 within second section 336. Contacts 320 and 322 may couple to the coil of MEMS device 218 to provide electrical contact with the coil and one or more contacts on a circuit board (not shown) onto which scanning module 300 may be placed within a housing of scanning system 100. Contacts 320 and 322 may be physically biased against corresponding contacts on MEMS device 218 to maintain physical and electrical contact with MEMS device 218 so that a mirror driving signal may be provided to MEMS device 218.

Such an arrangement of first section 328 and/or second section 336 may facilitate assembly of the components of scanning module 300 into frame 310 such that the components of scanning module 300 may be easily inserted into frame 310 without requiring additional alignment of the components such as laser 216 and/or MEMS device 218 after placement into frame 310. The tolerances with which frame 310 is manufactured may be sufficient to allow such assembly of scanning module 300 without requiring additional physical and/or electrical alignment of either laser 216 and/or scanning module 218. Frame 310 may further comprise one or more posts 324 and 326 having corresponding structures such as tabs to allow scanning module 300 to be attached to the circuit board (not shown) of scanning system 100 in a position with respect to window 228 as shown in FIG. 1 to allow for a range of motion for the sweep of the laser beam out of window 228 and to allow the laser beam reflected off of target 230 to enter back into the housing of scanning system 100 through window 228 to be detected by optical detector 236, although the scope of the claimed subject matter is not limited in these respects. It should be noted that although scanning module 300 of FIG. 3 pertains to a MEMS based scanning module for scanning system 100, scanning module 300 may be adapted to a MEMS based display module having a MEMS scanning rasterizer for generating a display from the laser light emitted from one or more lasers in a suitable arrangement to display an image projected onto a surface, in a display region such as in a head up display, and/or as an image projected onto a retina of a user, as a few of several examples, and the scope of the claimed subject matter is not limited in these respects.

Referring now to FIG. 4, a top plan view of a MEMS device for a scanner system in accordance with one or more embodiments will be discussed. As shown in FIG. 4, MEMS device 218 may comprise a silicon frame 410 from which structures of MEMS device 218 may be formed, for example via etching and/or photolithography to produced the desired structures. In one or more embodiments, frame 410 may comprise a unitary structure including contacts 412 and 414 that comprise the ends of a coil 422 disposed on coil frame 416. Coil frame 416 may be supported by one or more suspension arms 420 disposed at opposing ends of coil frame 416 along an axis of rotation of coil frame 416. Suspension arms 420 may comprise a continuous structure that extends into the interior region of coil frame 416 to couple to mirror platform 418 via connection points 432. Thus, in one or more embodiments, frame 410, coil frame 416, suspension arms 420, connection points 432, and mirror platform 418 may comprise a single piece of silicon or similar material. In one or more embodiments, coil 422 may be formed on coil frame 416 for example via deposition of a metal with a higher conductivity such as gold, aluminum, or copper. In one embodiment, coil 422 may comprise gold, although the scope of the claimed subject matter is not limited in this respect. Contact 412 may comprise a first end of coil 422, and contact 414 may comprise a second end of coil 422. In one or more embodiments, a mirror 428 may be formed as a thin metal film disposed on mirror platform 418 via deposition of a metal with higher optical reflectance properties, for example aluminum. Mirror 428 may be capable of reflecting a beam of laser light impinging on its surface in a direction controlled by movement of coil frame 416 and mirror platform 418 as discussed, below.

In one or more embodiments, coil 422 may be driven with a signal to cause coil frame 416 to move and/or oscillate in response to the signal in the presence of a magnetic field to generate electromotive force. The magnetic field may be provided by magnets 312 and 314 of FIG. 3 disposed adjacent to frame 410 as shown for example in FIG. 3. Since mirror platform 418 is coupled to coil frame 416 via connection points 432, mirror platform 418 moves along with coil frame 416. Magnet 312 may be disposed with its polarity aligned in a first direction normal to the plane of coil 422, and magnet 314 may be disposed with its polarity disposed in a second direction normal to the plane of coil 422 such that the polarity of magnet 312 is opposite to the polarity of magnet 314. Such an arrangement of coil 422 and magnets 312 and 314 causes coil frame 416 and mirror platform to rotate about an axis generally aligned with suspension arms 420. The rotation of suspension arms 420 imparts a twist in the structure of suspension arms 420 to accommodate the movement of coil frame 416 and mirror platform 418 along the axis generally aligned with suspension arms 420. In order to minimize warping of mirror 428 which may adversely affect the laser beam reflected off of mirror 428 and thereby interfere with the scanning of target 230, for example where such warping may be the result of residual stress between the metal film of mirror 428 and the silicon material of mirror platform 418, mirror platform 418 may be connected to coil frame 416 at connection points 432 that are disposed collinearly with suspension arms 420, which may be generally aligned with the axis of rotation of coil frame 416 and/or mirror platform 418. Such an arrangement may reduce warping of mirror 428 since coil frame 416 may be minimally warped as such locations corresponding where coil frame 416 couples to suspension arms 420. In order to isolate mirror platform 418 from the twist of suspension arms 420, from any warping of coil frame 416, and to maintain the planar flatness of mirror platform 418, one or more flexible members 426 may be disposed on mirror platform 418 adjacent to connection points 432. The transmission of any warping due to the residual stresses developed as a result of the metallization of coil frame 416 with the coil 422 to the mirror platform 418 and mirror 428 is reduced by the flexible members 426. As suspension arms 420 in response to movement of coil frame 416 when coil 422 is driven with a driving signal in the presence of a magnetic field, flexible members 426 prevent and/or reduce such twist from being imparted to mirror platform 418, thereby maintaining the relative flatness of mirror platform 418 and mirror 428.

Referring now to FIGS. 5 and 6, a perspective view and a top plan view of the MEMS device showing mechanical isolation of the mirror structure from the pivot structure to maintain flatness of the mirror structure accordance with one or more embodiments will be discussed. FIGS. 5 and 6 generally correspond to MEMS device 218 as shown in FIG. 4. In one or more embodiments as shown in FIGS. 5 and 6, flexible members 426 comprise slots formed in mirror platform 418 having a generally curvilinear shape that may generally conform to the circumference of mirror platform 418. As shown in FIGS. 5 and 6, flexible members may be disposed at a location generally collinear with the axis of rotation of coil frame 416, and/or in a direction generally perpendicular to the axis or rotation. However, this is merely one example of the structure of flexible members 426, and the scope of the claimed subject matter is not limited in this respect.

Referring now to FIGS. 7A and 7B, a top plan view of a MEMS device in comparison with flex information showing the amount of flex in the MEMS device along an axis of rotation in accordance with one or more embodiments will be discussed. As shown in FIG. 7A, mirror platform 418 may have flexible members 426 disposed generally along an x-axis for purposes of alignment with plot 710 of FIG. 7B which illustrates the amount of deflection in a z-direction along the x-axis. The x-axis may correspond to the axis of rotation about which mirror platform 418 may rotate during operation in which a driving coil 422 may impart motion to coil frame 316 and mirror platform 418. The z-axis may represent the amount of deflection in a direction normal to the plane of frame 410. As shown in FIG. 7B, as can be seen from plot 710 in comparison with FIG. 7A, when mirror platform 418 includes flexible members 426 and/or when mirror platform 418 is coupled to coil frame 416 at connection points 432 disposed generally collinear with suspension arms 420, there is a relatively small amount of deflection at points corresponding to mirror platform 418, and thus the relative flatness of mirror 428 is maintained across the surface thereof. Flexible members 426 further provide isolation from the severe z-direction deflection, at regions 714 of plot 710 which correspond warping of coil frame 416 due to residual stresses resulting from metallization with coil 422. Also, suspension arms 420 may be undergo a relatively large amount of deflection in the z-direction corresponding to twisting of suspension arms 420, while having a minimal or no impact on the flatness of mirror platform 418 and mirror 428.

Referring now to FIGS. 8A and 8B, graphs of surface flex of a MEMS device in accordance with one or more embodiments showing a reduced amount of flex in the mirror surface via the stress isolating structures of the MEMS device in accordance with one or more embodiments will be discussed. As shown in FIG. 8A, plot 810 indicates the amount of deformation of the surface of mirror platform 418 when no flexible members 426 are utilized. As shown in FIG. 8B, plot 812 indicates the amount of deformation of the surface of mirror platform 418 when flexible members 426 are utilized to isolate mirror platform 418 from the warping of coil frame 416 due to residual stresses resulting from metallization with coil 422. As can be seen from a comparison of FIGS. 8A and 8B, it has been found that utilization of flexible members 426 may result in about a twofold or greater reduction in the amount of deformation of mirror platform 418, thereby resulting in a generally more flat mirror 428 and generally increased performance of scanning system 100. It should be noted that connection points 432 and/or flexible members 426 may also be utilized with a two-dimensional, bi-axial type bar code scanner or the like wherein mirror 428 may be modulated along two orthogonal axes, for example where coil frame 416 may comprise an inner coil frame and an outer coil frame concentrically disposed and supported by two sets of suspension arms, or where the magnetic field and suspension design allows for two-dimensional motion of a single coil frame, and/or equivalent structures and/or arrangements. Furthermore, such structures and/or arrangements of connection points 432 and/or flexible members 426 may be utilized with a MEMS based scanning display capable of generating an image from one or more lasers 216 to display an image, and the scope of the claimed subject matter is not limited in these respects.

Referring now to FIG. 9, a block diagram of an information handling system capable of utilizing a suspension for maintaining mirror flatness in a MEMS device or the like in accordance with one or more embodiments will be discussed. Information handling system 900 of FIG. 9 may tangibly embody scanning system 100 as shown in and described with respect to FIG. 1. Although information handling system 900 represents one example of several types of computing platforms, information handling system 900 may include more or fewer elements and/or different arrangements of elements than shown in FIG. 9, and the scope of the claimed subject matter is not limited in these respects.

Information handling system 900 may comprise one or more processors such as processor 910 and/or processor 912, which may comprise one or more processing cores. One or more of processor 910 and/or processor 912 may couple to one or more memories 916 and/or 918 via memory bridge 914, which may be disposed external to processors 910 and/or 912, or alternatively at least partially disposed within one or more of processors 910 and/or 912. Memory 916 and/or memory 918 may comprise various types of semiconductor based memory, for example volatile type memory and/or non-volatile type memory. Memory bridge 914 may couple to a video/graphics system 920 to drive a display device, which may comprise MEMS module 936, coupled to information handling system 900.

Information handling system 900 may further comprise input/output (I/O) bridge 922 to couple to various types of I/O systems. I/O system 924 may comprise, for example, a universal serial bus (USB) type system, an IEEE 1394 type system, or the like, to couple one or more peripheral devices to information handling system 900. Bus system 926 may comprise one or more bus systems such as a peripheral component interconnect (PCI) express type bus or the like, to connect one or more peripheral devices to information handling system 900. A hard disk drive (HDD) controller system 928 may couple one or more hard disk drives or the like to information handling system, for example Serial Advanced Technology Attachment (Serial ATA) type drives or the like, or alternatively a semiconductor based drive comprising flash memory, phase change, and/or chalcogenide type memory or the like. Switch 930 may be utilized to couple one or more switched devices to I/O bridge 922, for example Gigabit Ethernet type devices or the like. Furthermore, as shown in FIG. 9, information handling system 900 may include a baseband and radio-frequency (RF) block 932 comprising a base band processor and/or RF circuits and devices for wireless communication with other wireless communication devices and/or via wireless networks via antenna 934, although the scope of the claimed subject matter is not limited in these respects.

In one or more embodiments, information handling system 900 may include a MEMS module 936 that may correspond to scanning module 300 of FIG. 3 and which may include any one or more components of scanning system 100 such as processor 110, scan line generator 112, target bar code imager 114, user interface 116, communications/connectivity block 118, and/or power management block 120. In one or more embodiments, MEMS module 936 may be controlled by one or more of processors 910 and/or 912 to implements some or all of the functions of processor 110 of FIG. 1. MEMS module 936 may include MEMS device 218 as shown in and described with respect to FIGS. 2 through FIGS. 8, for example, and which may include mirror platform 418 connected to coil frame 416 via connection points 432 disposed generally collinear with suspension arms 420, and which may further include flexible members 426 to maintain the relative flatness of mirror 428 disposed on mirror platform 418, and further to isolate deformation of suspension arms 420 from mirror platform 418 and mirror 428. In one or more embodiments, MEMS module 936 may comprise a scanner for scanning target 230 such as a bar code represented by target/display 940, and/or may comprise a MEMS based display for displaying an image projected by MEMS module 936 where the image may likewise be represented by target/display 940. In one or more embodiments, a scanned beam display engine may comprise video/graphics block 920 having a video controller to provide video information 938 to MEMS module 936 to display an image represented by target/display 940. In one or more embodiments, such a MEMS module 936 may include MEMS device 218 as described herein. In particular embodiments, MEMS device 218 may comprise a biaxial mirror system wherein mirror 428 may reflect a beam from laser 216 in two dimensions to generate a two-dimensional image. However, these are merely example implementations for MEMS module 936 within information handling system 900, and the scope of the claimed subject matter is not limited in these respects.

Although the claimed subject matter has been described with a certain degree of particularity, it should be recognized that elements thereof may be altered by persons skilled in the art without departing from the spirit and/or scope of claimed subject matter. It is believed that the subject matter pertaining to suspension for maintaining mirror flatness in a MEMS device or the like and/or many of its attendant utilities will be understood by the forgoing description, and it will be apparent that various changes may be made in the form, construction and/or arrangement of the components thereof without departing from the scope and/or spirit of the claimed subject matter or without sacrificing all of its material advantages, the form herein before described being merely an explanatory embodiment thereof, and/or further without providing substantial change thereto. It is the intention of the claims to encompass and/or include such changes. 

1. An apparatus, comprising: a coil frame having a coil disposed along a perimeter of said coil frame, said coil frame being supported by one or more suspension arms disposed along an axis of said coil frame; a mirror platform having a mirror disposed thereon, said mirror platform being coupled to said coil frame at connection points disposed generally collinear with the axis, wherein the coil frame and the coil circumscribe the mirror platform; and at least one or more flexible members disposed at an edge of said mirror platform at a location generally collinear with the axis and perpendicular to the axis of rotation.
 2. The apparatus as claimed in claim 1, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being aligned generally perpendicular to the axis.
 3. The apparatus as claimed in claim 1, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being generally curvilinear.
 4. The apparatus as claimed in claim 1, the flexible members being capable of isolating the mirror from warping of the coil frame due to residual stress between the coil frame and the coil.
 5. The apparatus as claimed in claim 1, the flexible members being capable of isolating the mirror from deflection of said one or more suspension arms to maintain a relative flatness of the mirror.
 6. The apparatus as claimed in claim 1, said coil frame, said mirror platform, the one or more suspension arms, or the connection points, or combinations thereof, comprising a unitary structure.
 7. The apparatus as claimed in claim 1, said coil frame, said mirror platform, the one or more suspension arms, or the connection points, or combinations thereof, comprising silicon.
 8. An apparatus, comprising: a coil frame having a coil disposed along a perimeter of said coil frame, said coil frame being supported by one or more suspension arms disposed along an axis of said coil frame; and a mirror platform having a mirror disposed thereon, said mirror platform having at least one or more flexible members disposed at an edge of said mirror platform at a location generally collinear with the axis and perpendicular to the axis of rotation, wherein the coil frame and the coil circumscribe the mirror platform.
 9. The apparatus as claimed in claim 8, said mirror platform being coupled to said coil frame at connection points disposed generally collinear with the axis.
 10. The apparatus as claimed in claim 8, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being aligned generally perpendicular to the axis.
 11. The apparatus as claimed in claim 8, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being generally curvilinear.
 12. The apparatus as claimed in claim 8, the flexible members being capable of isolating the mirror from warping of said coil frame due to residual stress between said coil frame and the coil.
 13. The apparatus as claimed in claim 8, the flexible members being capable of isolating the mirror from deflection of the one or more suspension arms to maintain a relative flatness of the mirror.
 14. The apparatus as claimed in claim 8, said coil frame, said mirror platform, the one or more suspension arms, or the flexible members, or combinations thereof, comprising a unitary structure.
 15. The apparatus as claimed in claim 8, said coil frame, said mirror platform, the one or more suspension arms, or combinations thereof, comprising silicon.
 16. An information handling system, comprising: a processor; a memory coupled to said processor; and a MEMS module capable of being controlled by said processor by a program stored in the memory, said MEMS module comprising: a coil frame having a coil disposed along a perimeter of said coil frame, said coil frame being supported by one or more suspension arms disposed along an axis of said coil frame; and a mirror platform having a mirror disposed thereon, said mirror platform being coupled to said coil frame at connection points disposed generally collinear with the axis and having at least one or more flexible members disposed at an edge of said mirror platform at a location generally collinear with the axis and perpendicular to the axis of rotation, wherein the coil frame and the coil circumscribe the mirror platform.
 17. The information handling system as claimed in claim 16, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being aligned generally perpendicular to the axis.
 18. The information handling system as claimed in claim 16, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being generally curvilinear.
 19. The information handling system as claimed in claim 16, the flexible members being capable of isolating the mirror from warping of said coil frame due to residual stress between said coil frame and the coil.
 20. The information handling system as claimed in claim 16, the flexible members being capable of isolating the mirror from deflection of the one or more suspension arms to maintain a relative flatness of the mirror.
 21. The information handling system as claimed in claim 16, said coil frame, said mirror platform, the one or more suspension arms, the connection points, or the flexible members, or combinations thereof, comprising a unitary structure.
 22. The information handling system as claimed in claim 16, said coil frame, said mirror platform, the one or more suspension arms, or the connection points, or combinations thereof, comprising silicon.
 23. The information handling system as claimed in claim 16, said MEMS module comprising a MEMS based scanner.
 24. The information handling system as claimed in claim 16, said MEMS module comprising a MEMS based display.
 25. A scanned beam display engine, comprising: a video controller; and a MEMS module capable of being controlled by said video controller to display an image, said MEMS module comprising: a coil frame having a coil disposed along a perimeter of said coil frame, said coil frame being supported by one or more suspension arms disposed along an axis of said coil frame; and a mirror platform having a mirror disposed thereon, said mirror platform being coupled to said coil frame at connection points disposed generally collinear with the axis and having at least one or more flexible members disposed at an edge of said mirror platform at a location generally collinear with the axis and perpendicular to the axis of rotation, wherein the coil frame and the coil circumscribe the mirror platform.
 26. The scanned beam display engine as claimed in claim 25, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being aligned generally perpendicular to the axis.
 27. The scanned beam display engine as claimed in claim 25, wherein one or more of the flexible members comprises a slot formed in said mirror platform, the slot being generally curvilinear.
 28. The scanned beam display engine as claimed in claim 25, the flexible members being capable of isolating the mirror from warping of the coil frame due to residual stress between the coil frame and the coil.
 29. The scanned beam display engine as claimed in claim 25, the flexible members being capable of isolating the mirror from deflection of the one or more suspension arms to maintain a relative flatness of the mirror. 